SPECTRO GENESIS A. Polychromator • Thermally stabilized to +30°C ± 0.5°C • Hollow section design in dual Paschen-Runge mounting • 400 mm focal length • Holographic concave master grating: 2400 g/mm • Quartz optical components • Full 1st order wavelength coverage • Wavelength range: 175 - 777 nm • Entrance slits width: 15 µm B. Detector • 15 pre-aligned linear CCD arrays, fitted in continuous order, selected and optimized according to the wavelength range • 2048 pixels per array • Pixel resolution 14pm • Thermally stabilized to +30°C ± 0.5°C through optical system • Parallel readout architecture • On board digital signal processor for each CCD array • Intelligent data acquisition and data reduction system • Dynamic range up to 8 orders of magnitude • Shortest integration time1 ms • Shortest measurement time for one analysis: 3 sec (includes measurement and evaluation of the complete spectrum) • Integration time automatically optimized for each pixel according to signal height • Full spectrum access • Automatic dark current correction • ICAL - automatic profile standardization • TCP/IP interface to data processing system C. UV System • Argon purged hollow section, optimized for low pure rates (purge only required for measurements below 190nm) • Argon flow rate: 0-1.0 l/min D. RF-Generator • Free running type • Frequency: 27.12 MHz • RF power output: 0.7 to 1.7 kW • Power stability